Ultrasonic Sputtering Target Cleaner
MECS, opening up a new future.
Ultrasonic Sputtering Target Cleaning Machine
MECS TECH introduces a unique ultrasonic cleaning method distinct from the conventional ultrasonic cleaning using dip tanks. By adopting MECS TECH's proprietary ultrasonic cleaning method, it provides a solution to prevent recontamination of sputtering targets in the dip tanks during ultrasonic cleaning.
This ensures a thorough target cleaning process.
Ultrasonic Target Cleaning M/C(Single Axis)
| Model No. |
Single axis Driven Type |
| Ultrasonic Frequency |
20 KHz ± 1 KHz |
| Ultrasonic Output |
2,000 Watt (Max) |
| Main Power |
220V / 1 phase |
| Bath Size |
Designed based on customer’s target size |
| Horn Size |
Max 420mm / one Horn |
| Pneumatic system for Head up-down Driven |
Over 3 bar |
| Cleaning Liquid Filtering System |
Driven by induction Motor |
| Cleaning Horn X Axis Movement |
Induction Motor에 의한 구동 |
| Cleaning Horn Z Axis (Up-down) Movement |
Driven by pneumatic system |
| Major Features |
| Target Load & Unload |
Manual |
| Cleaning Counter Set |
Available |
| Dry system |
No |
| Cleaning Liquid Recycling & Filtering System |
Yes |
| Filter Replacement Time Control |
Yes |
| Cleaning Speed |
Adjustable (Max : about 2M /min) |
| Control System |
PLC |
Ultrasonic Target Cleaning M/C(Two Axis)
| Model No. |
Two axis Driven Type |
| Ultrasonic Frequency |
20 KHz ± 1 KHz |
| Ultrasonic Output |
2,000 Watt (Max) |
| Main Power |
220V / 1 phase |
| Bath Size |
Designed based on customer’s target size |
| Horn Size |
Max 420mm / one Horn |
| Cleaning Liquid Filtering System |
3 stage filtering (0.5 um) |
| Cleaning Horn X Axis Movement |
Driven by Servo Motor |
| Cleaning Horn Z Axis Movement |
Driven by Servo system |
| Major Features |
| Target Load & Unload |
Automatically load & unload by Roller system |
| Cleaning Counter Set |
Available |
| Dry system |
Yes |
| Cleaning Liquid Recycling & Filtering System |
Yes |
| Filter Replacement Time Control |
Yes |
| Cleaning Speed |
Adjustable (Max : about 2M /min) |
| Horn Movement according to target surface |
Yes(Even though target surface is not plain, Horn automatically moves above target surface with maintaining equal distance between Horn and target surface) |
| Control System |
PLC, Touch Panel |
